Sept 7, 2022

NSF funds new electron beam lithography system for quantum engineering, nanofabrication on Boulder campus – A new industry-grade 100 kV electron beam writer will be coming soon to CU Boulder. Professor Juliet Gopinath from the Department of Electrical, Computer and Energy Engineering said that electron beam lithography has wide applicability in materials research and that this system features nanometer-scale resolution along with the ability to produce high-quality devices through nanofabrication.